CVD/ALD/PLD Precursors, Services, & Custom Parts Fabrication
Colonial Metal’s offers a variety of ALD/CVD/PLD precursors for use in semiconductor manufacturing. CMI specializes in platinum group metal compounds but can source a variety of specialty chemical compounds based on customer needs. Our development team works with customers to develop and scale up organometallic and inorganic metal compounds.
CMI provides specialty packaging services for products used in the semiconductor industry. Our team will manage the complete packaging process for customers including receiving in used canisters, cylinders, or bubblers from customers and providing decontamination services before packaging the desired product in a clean room setting. Our team sources consumable parts as part of our services and has relationships with precision metal fabricators for custom part fabrication.
We provide turn-key specialty packaging services in our ISO Class 6 cleanroom including:
Canister, cylinder, and bubbler cleaning/decontamination including mechanical, chemical, and thermal methods.
Canister, cylinder, and bubbler filling including liquids, solids, gases, and mixed compositions for products in our catalog and products we source for our customers.
Custom fabrication of electropolished canisters and bubblers in various common and specialty alloys.
We specialize in reducing supply chain complexity for our semiconductor industry customers by providing a one-stop shop for ALD/CVD precursors, parts, and services. We can fabricate customer parts based on drawings, or a customer supplied prototype. If you have a difficult packaging requirement, we are up for the challenge!
ALD/CVD/PLD Precursors
CMI specializes in the manufacturing of PGM compounds for the semiconductor industry. Below is the current list of the ALD/CVD/PLD products we manufacture at our facility. Our complete chemical catalog can also be found here: www.colonialmetals.com/products. If you have a need for a compound that we do not list in our catalogue, our technical team frequently develops new products based on customer needs. Please email Sales@Colonialmetals.com for additional information and sales inquiries.
CMI Part Number |
Description |
CAS# |
Re Products |
||
Tricarbonyl(cyclopentadienyl)rhenium(I) |
CpRe(CO)3 |
|
Tricarbonyl(pentamethylcyclopentadienyl)rhenium(I) |
Cp*Re(CO)3 |
|
Ir Products |
||
Tris(norbornadiene)acetylacetonate Iridium (III) |
41612-46-8 |
|
Acetylacetonato(1,5-cyclooctadiene)iridium(I) |
12154-84-6 |
|
Methylcyclopentadienyl(1,5-Cyclooctadiene)iridium(I) |
132644-88-3 |
|
3055 |
1-Ethylcyclopentadienyl(1,3-cyclohexadiene)iridium(I) |
721427-58-3 |
(1,5-cyclooctadiene(hexafluoroacetylacetonato)Iridium(I) |
34801-95-1 |
|
Os Products |
||
Osmium tetroxide |
20816-12-0 |
|
Bis(pentamethylcyclopentadienyl)osmium(II) |
100603-32-5 |
|
Bis(cyclopentadienyl)osmium(II), “Osmocene” |
1273-81-0 |
|
Pd Products |
||
Allyl(cyclopentadienyl)palladium(II) |
1271-03-0 |
|
Palladium bis-(hexafluoroacetylacetonate) |
64916-48-9 |
|
Bis(2,2’,6,6’-tetramethylheptanedionato)palladium(II) |
15214-66-1 |
|
Pt Products |
||
Platinum(II) acetylacetonate |
15170-57-7 |
|
Dimethyl(1,5-cycloctadiene)platinum(II) |
12266-92-1 |
|
(Trimethyl)cyclopentadienylplatinum(IV) |
1271-07-4 |
|
Trimethyl(methlycyclopentadienyl)platinum(IV) |
94442-22-5 |
|
(Trimethyl)ethylcyclopentadienylplatinum(IV) |
229621-40-3 |
|
(Trimethyl)pentamethylcyclopentadienylplatinum(IV) |
97262-98-1 |
|
Rh Products |
||
Rhodium(III) acetylacetonate |
14284-92-5 |
|
Rhodium(I) dicarbonylacetylacetonate |
14874-82-9 |
|
Acetylacetonate(1,5-cyclooctadiene)rhodium(I) |
12245-39-5 |
|
Dicarbonyl(pentamethylcyclopentadienyl)rhodium(I) |
32627-01-3 |
|
Ru Products |
||
Ruthenium(III) acetylacetonate |
14284-93-6 |
|
Ruthenocene |
1287-13-4 |
|
Triruthenium dodecacarbonyl |
15243-33-1 |
|
Bis(pentamethylcyclopentadienyl)ruthenium(II) |
84821-53-4 |
|
Bis(2-methylallyl)(1,5-cyclooctadiene)ruthenium(II) |
12289-94-0 |
|
Bis(ethylcyclopentadienyl)ruthenium(II) |
32992-96-4 |
|
Tris(2,2,6,6 tetramethyl-3,5 heptanedionato)ruthenium(III) |
38625-54-6 |
|
Allylruthenium(II) tricarbonyl bromide |
31781-74-5 |
|
Ag Products |
||
2,2,6,6-Tetramethyl-3,5-heptanedionato silver(I) |
79827-25-1 |
|
Trimethylphosphine(hexafluoroacetylacetonato)silver(I) |
148630-66-4 |
|
Silver(I) acetylacetonate |
15525-64-1 |