CVD/ALD/PLD Precursors, Services, & Custom Parts Fabrication

Colonial Metal’s offers a variety of ALD/CVD/PLD precursors for use in semiconductor manufacturing. CMI specializes in platinum group metal compounds but can source a variety of specialty chemical compounds based on customer needs. Our development team works with customers to develop and scale up organometallic and inorganic metal compounds.

CMI provides specialty packaging services for products used in the semiconductor industry. Our team will manage the complete packaging process for customers including receiving in used canisters, cylinders, or bubblers from customers and providing decontamination services before packaging the desired product in a clean room setting. Our team sources consumable parts as part of our services and has relationships with precision metal fabricators for custom part fabrication.

We provide turn-key specialty packaging services in our ISO Class 6 cleanroom including:

Canister, cylinder, and bubbler cleaning/decontamination including mechanical, chemical, and thermal methods.

Canister, cylinder, and bubbler filling including liquids, solids, gases, and mixed compositions for products in our catalog and products we source for our customers.

Custom fabrication of electropolished canisters and bubblers in various common and specialty alloys.

 

 

We specialize in reducing supply chain complexity for our semiconductor industry customers by providing a one-stop shop for ALD/CVD precursors, parts, and services. We can fabricate customer parts based on drawings, or a customer supplied prototype. If you have a difficult packaging requirement, we are up for the challenge!

ALD/CVD/PLD Precursors

CMI specializes in the manufacturing of PGM compounds for the semiconductor industry. Below is the current list of the ALD/CVD/PLD products we manufacture at our facility. Our complete chemical catalog can also be found here: www.colonialmetals.com/products. If you have a need for a compound that we do not list in our catalogue, our technical team frequently develops new products based on customer needs. Please email Sales@Colonialmetals.com for additional information and sales inquiries.

 

CMI Part Number

Description

CAS#

Re Products

1026

Tricarbonyl(cyclopentadienyl)rhenium(I)

CpRe(CO)3

1027

Tricarbonyl(pentamethylcyclopentadienyl)rhenium(I)

Cp*Re(CO)3

Ir Products

3038

Tris(norbornadiene)acetylacetonate Iridium (III)

41612-46-8

3047

Acetylacetonato(1,5-cyclooctadiene)iridium(I)

12154-84-6

3050

Methylcyclopentadienyl(1,5-Cyclooctadiene)iridium(I)

132644-88-3

3055

1-Ethylcyclopentadienyl(1,3-cyclohexadiene)iridium(I)

721427-58-3

3058

(1,5-cyclooctadiene(hexafluoroacetylacetonato)Iridium(I)

34801-95-1

Os Products

4008

Osmium tetroxide

20816-12-0

4026

Bis(pentamethylcyclopentadienyl)osmium(II)

100603-32-5

4027

Bis(cyclopentadienyl)osmium(II), “Osmocene”

1273-81-0

Pd Products

5036

Allyl(cyclopentadienyl)palladium(II)

1271-03-0

5103

Palladium bis-(hexafluoroacetylacetonate)

64916-48-9

5109

Bis(2,2’,6,6’-tetramethylheptanedionato)palladium(II)

15214-66-1

Pt Products

6039

Platinum(II) acetylacetonate

15170-57-7

6103

Dimethyl(1,5-cycloctadiene)platinum(II)

12266-92-1

6109

(Trimethyl)cyclopentadienylplatinum(IV)

1271-07-4

6110

Trimethyl(methlycyclopentadienyl)platinum(IV)

94442-22-5

6111

(Trimethyl)ethylcyclopentadienylplatinum(IV)

229621-40-3

6112

(Trimethyl)pentamethylcyclopentadienylplatinum(IV)

97262-98-1

Rh Products

7011

Rhodium(III) acetylacetonate

14284-92-5

7039

Rhodium(I) dicarbonylacetylacetonate

14874-82-9

7050

Acetylacetonate(1,5-cyclooctadiene)rhodium(I)

12245-39-5

7079

Dicarbonyl(pentamethylcyclopentadienyl)rhodium(I)

32627-01-3

Ru Products

8019

Ruthenium(III) acetylacetonate

14284-93-6

8034

Ruthenocene

1287-13-4

8047

Triruthenium dodecacarbonyl

15243-33-1

8048

Bis(pentamethylcyclopentadienyl)ruthenium(II)

84821-53-4

8055

Bis(2-methylallyl)(1,5-cyclooctadiene)ruthenium(II)

12289-94-0

8065

Bis(ethylcyclopentadienyl)ruthenium(II)

32992-96-4

8066

Tris(2,2,6,6 tetramethyl-3,5 heptanedionato)ruthenium(III)

38625-54-6

8113

Allylruthenium(II) tricarbonyl bromide

31781-74-5

Ag Products

9029

2,2,6,6-Tetramethyl-3,5-heptanedionato silver(I)

79827-25-1

9030

Trimethylphosphine(hexafluoroacetylacetonato)silver(I)

148630-66-4

9057

Silver(I) acetylacetonate

15525-64-1